SIMS järjestelmät ja laitteet

Secondary ion mass spectrometry, eli SIMS, on mittausmenetelmä pintojen ja ohutkalvojen kemiallisen rakenteen määrittämiseen. SIMS:ssä näytteen pintaan kohdistetaan ionisuihku ja pinnasta irtoavat atomit, molekyylit sekä molekyyliryppäät analysoidaan massaspektrometrisesti. SIMS-tekniikoita voidaan käyttää koko jaksollisen järjestelmän alkuaineiden karakterisointiin, sekä kvalitatiivisesti että kvantitatiivisesti. SIMS sopii sekä alkuainekuvantamiseen, että syvyysprofilointiin kiinteistä näytteistä.

SIMS-tekniikka jaetaan kahteen alakategoriaan, staattiseen (static SIMS) ja dynaamiseen (dynamic SIMS tai DSIMS). Staattinen SIMS keskittyy yleensä ylimpään tai muutamaan ylimpään molekyylikerrokseen ja niiden atomi- sekä molekyylirakenteeseen.

Dynaamisessa SIMS:ssä voimakkaampi ionisäde kohdistetaan näytteeseen pidemmän aikaa, jolloin ionisäteen ionit (happi tai cesium) sekoittuvat näytteeseen, mikä lopulta saavuttaa vakaan tilan. Tätä tekniikkaa käytetään erityisesti puolijohteiden faasirajapintojen ja atomilisäysten (doping) sekä kontaminaatioiden tunnistamiseen.

Hiden Analytical valmistaa SIMS-laitteistoja sekä kvadropoli-detektoreilla, että time-of-flight (ToF)-detektorilla. Lisäksi he valmistavat erilliskomponentteina ionikanuunoita ja massadetektoreita SIMS-käyttöön kustomointeihin, SEM lisälaitteiksi ja muihin vastaaviin tarkoituksiin. Hiden Analyticalilta löytyy monipuolisesti eri tason SIMS-laitteistoja eri käyttötarkoituksiin.

Compact SIMS

Compact SIMS – a design breakthrough for surface analysis

The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry set to provide is ideal for nanometre depth resolution and near surface analysis.

he Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis.

A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. The instrument has a small footprint and is exceptionally easy to use, it boasts the same control software and ion gun system as the fully featured Hiden SIMS Workstation family, providing depth profiles, 3D and 2D images and mass spectral data. The MAXIM-600P detector is based around the highly reliable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun option is available for analysis of insulating samples.

In addition to SIMS, the Compact SIMS has an SNMS facility that is useful for quantification of high concentration elements, such as alloys.




Automatic Surface Analysis System

Hiden Analytical has developed a fully self-contained automatic surface analysis system in the AutoSIMS, an innovative secondary ion mass spectrometer (SIMS) that can perform routine and repetitive analysis with unattended operation. With a fully-automated X-Y stage and expanded holder, the AutoSIMS by Hiden can run hundreds of processes a day during uninterrupted 24/7 operation.

Hiden Analytical specializes in SIMS instruments for nanoscale depth profiling and quantitative surface analysis of myriad different sample types, from comprehensive workstations to compact SIMS solutions. The AutoSIMS comprises the same long-life oxygen-source primary ion gun and MAXIM analyzer found throughout the Hiden SIMS product line, with the addition of a modular cassette sample holder and a software-driven X-Y sample stage. This provides the basis for high-reliability detection of relevant surface spectra and three-dimensional (3D) depth profiles without human intervention.

The long service life of the ion gun ensures a consistent high-stability beam is generated throughout extended periods of operation, allowing the cassette holder and sample stage to deliver continuous sample doses for high throughput batch analysis. Even novice operators can program the automatic surface analysis system by tweaking the matrix of experimental parameters through a simple spreadsheet.

AutoSIMS by Hiden Analytical

The AutoSIMS automatic surface analysis system by Hiden can perform both static and dynamic SIMS analysis with nanometre depth resolution, with complete independence. It can also be run in manual mode for expert users looking to exploit the full raft of technical possibilities available to them.

If you would like to learn more about the features of the AutoSIMS by Hiden, browse our product literature on this page. Or, contact a member of the Hiden Analytical team today with any order queries.



HIDEN UHV ohutkalvojen pintojen syvyyden profiloija

A UHV surface analysis system for thin film depth profiling

Hiden Analytical provides extremely versatile high-sensitivity instrumentation for high performance dynamic and static SIMS (secondary ion mass spectrometry) analysis, unlocking new levels of precision in cutting-edge applications. With an extended range and the ability to acquire and identify both positive (+ve) and negative (-ve) secondary ions, the SIMS workstation is a comprehensive solution for composition analysis and depth profiling applications.

For simultaneous +ve and -ve ion analysis in a comprehensive SIMS package, Hiden Analytical has also developed the innovative Hi5 SIMS workstation

Secondary ion mass spectrometry, or SIMS, is one of the most sensitive techniques ever developed for interrogating the uppermost surface layers of a material, from depths of several hundred nanometres (nm) to a single atomic layer. It can obtain compositional data down to the parts per billion (ppb) range and is compatible with any material that can reliably be tested in vacuum conditions. Consequently, SIMS instruments are routinely used to analyse ceramics, metals, organic materials, polymers, semiconductors, and more.

This technique is broken down into two distinct methodologies: dynamic and static SIMS. Each of these uses a primary ion beam that impacts a sample in vacuum conditions, causing extremely small volumes of material to be ablated from the surface – a fraction of this ejected material will be ionised. These secondary ions are acquired by the sample inlet of the mass spectrometry unit to develop a robust understanding of the composition of the specimen’s uppermost surface layers.

The primary difference between dynamic and static SIMS is the ion dosage (a higher dose for dynamic SIMS instruments), and that dynamic SIMS cannot be run with a defocussed ion beam; it must be raster scanned across the sample surface to produce a flat-bottomed crater. Hiden Analytical’s SIMS workstation can perform both dynamic and static SIMS analysis in a single consolidated SIMS instrument. With a dual-mode MAXIM mass spectrometer, the SIMS workstation can operate in secondary ion detection mode for +ve/-ve ion detection, and in a secondary neutral detection mode for +ve data quantification. Each mode is compatible with mass range options up to 5000 atomic mass units (amu).

Hiden Analytical’s SIMS Workstation

Our SIMS workstation is a comprehensive solution for depth profiling and compositional analysis of samples in various areas of surface analysis, thin film engineering, nanotechnology, fuel cell research, and more. The system is highly customizable to suit the unique requirements of users in complex fields.



HIDEN UHV ohutkalvojen pintojen syvyyden profiloija

Innovative Time of Flight Quadrupole SIMS System

The Hiden TOF-qSIMS system is designed for surface analysis and depth profiling applications of a wide range of materials including polymers, pharmaceuticals, superconductors, semiconductors, alloys, optical and functional coatings and dielectrics, with measurement of trace components to sub-ppm levels.

The new Hiden TOF, time of flight analyser enhances SIMS to give the user the best of the dynamic range from high performance quadrupole SIMS together with the advantages of parallel data collection and molecular fragment analysis from time of flight SIMS, TOF-SIMS.

The TOF-qSIMS capability enables hyperspectral imaging for spatially resolved detailed materials analysis.

The TOF-qSIMS system offers the comprehensive capabilities of static TOF-SIMS, and high dynamic range depth profiling from the quadrupole SIMS.

Fully integrated and optimised for high performance SIMS analysis, the TOF-qSIMS Workstation system includes a multi-port UHV chamber, TOF-SIMS analyser, Hiden’s MAXIM quadrupole SIMS analyser, IG20 gas primary ion gun, a Cs metal Ion gun and a sample holder designed to accommodate the broadest sample range.  High sensitivity SNMS mode is included for quantitative analysis of metallurgical thin films, conductive and non-conductive oxides and other alloy materials and coatings. Facilities for SIMS enhancement including oxygen flood, electron charge neutralization and vacuum bakeout are included as standard.

The SIMS Mapper PC software option provides for mapping with 2D and 3D view capability over the sample area. Electronic gating is included for optimised high dynamic range depth profiling. The TOF SIMS analysis capability includes full spectral analysis, pixel by pixel across the sample image.

 The SIMS PC data system, MASsoft Professional, includes a simple user-configurable interface for control and data acquisition, including set up and control of the primary ion beam rastering for surface analysis and depth profile applications.




A system for the analysis of secondary positive and negative ions from solid samples

Hiden Analytical supplies world-class mass spectrometry solutions and innovative tools for ion analyses, including the tried-and-trusted Hiden EQS. This high transmission electrostatic quadrupole secondary ion mass spectrometer (SIMS) is one of our most popular detection systems for research-scale thin film nanoscale surface analysis. The EQS SIMS analyser is an ideal add-on analyser for XPS and focused ion beam FIB microscopy systems.

The Hiden EQS is a unique electrostatic quadrupole SIMS detector, specialised for the mass spectral analysis of both positive (+ve) and negative (-ve) secondary ions from solid samples. With its integrated 45° electrostatic sector ion energy analyser, the Hiden EQS can simultaneously analyse ion energy with a resolution of 0.2 electron volts (eV). This makes it one of the most versatile tools for ion analyses in a raft of mass spectrometry applications, including:

  • Extending the sensitivity range of XPS by a factor of over 1000 
  • Dynamic and static SIMS
  • Focussed ion beam (FIB) mass spectrometry
  • Secondary neutral mass spectrometry (SNMS)
  • Sputter depth profiling
  • Sputtered ion and neutral mass/energy analysis

Tools for Ion Analysis from Hiden Analytical

A popular bolt-on fitting for after-market systems, ideal as an add-on for XPS systems and focused ion beam FIB microscopy systems for example, the Hiden EQS offers high sensitivity and optional differential pumping to meet the imaging, depth profiling, and mass spectra requirements of users in a range of applications.

If you need more information about integrating our electrostatic quadrupole SIMS tool into your existing XPS system, FIB microscopy  system or if you require a ground-up solution for your ion analyses, simply contact a member of the Hiden Analytical team today.



HIDEN MAXIM järjestelmä staattisiin ja dynaamisiin SIMS ja SNMS mittauksiin

A system for static and dynamic SIMS and SNMS applications

The Hiden MAXIM quadruple SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.

The MAXIM analyser system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.

The 30° acceptance angle allows the MAXIM to be mounted with its axis parallel to the plane of the sample, leaving a clear view of the sampled area for other light or ion optics. The MAXIM is tolerant of sample charging making it an ideal probe for the analysis of insulators. Also, large acceptance angle allows for wide area imaging.



XPS SIMS workstation
UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS

A multi-technique UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS installed on the Hiden SIMS Workstation

X-ray Photoelectron Spectroscopy is a highly complementary technique providing atomic composition and chemical state bonding information. XPS can be used to quantify high concentrations and is thus ideal for providing calibration points for the very much more sensitive SIMS technique. 

The Hiden SIMS Workstation two-part chamber is designed specifically to mount the XPS upgrade using state-of-the-art components from SPECS® and togther with tilting sample holders allowing for both XPS and SIMS techniques on the same UHV platform without compromise.

The PHOIBOS 150 HV analyzer series is the intrument of choice for high energy XPS analysis (HAXPES). High voltage power supplies and a  highly stable analyzer design allow photoemission up to a kinectic energy of 7 keV, covering most of the existing X-ray light sources and synchrotron facilities.

This analyzer can be operated in high voltage mode and in additon in all relevant analysis modes, such as (M)XPS, UPS, as well as AES, ISS and LEISS. Its design and the modular supplementary hardware makes this analyzer the most versatile PES analyzer in the market. It can easily be upgraded with all available SPECS detection systems.

The integrated 1D-DLD detector is the best performing detection system available. The direct detection of electron signals yield quantitative counts per second (cps). The powerful electronics can aquire ultrafast snapshot measurements of the energy spectrum with up to 1200 energy channels as well as continous sweeping energy spectra. Its low dark count rate and high linearity make this detector outstanding for XPS analyis.

The analyzer comes with a highly stable power supply, the HSA 7000, for best performance in at high and medium kinetic energy range up to 7000 eV.